Flat pasting equipment for wafer photoetching development

The invention relates to flat pasting equipment for wafer photoetching development. The flat pasting equipment is structurally provided with a sliding rail frame, a lifting table, a flat pasting base and an assembly fixing piece, the upper portion of the sliding rail frame is connected with the asse...

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1. Verfasser: HU HUIHONG
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention relates to flat pasting equipment for wafer photoetching development. The flat pasting equipment is structurally provided with a sliding rail frame, a lifting table, a flat pasting base and an assembly fixing piece, the upper portion of the sliding rail frame is connected with the assembly fixing piece in a welded mode, the rear portion of the lifting table is movably connected to the front portion of the sliding rail frame, and the flat pasting base is detachably installed at an opening in the upper portion of the lifting table; and the flat pasting base is provided with a lifting control rod, a pushing device and a fixing disc, the pushing device is fixedly connected to the upper portion of the lifting control rod, and the inside of the pushing device is connected with the bottom of the fixing disc in a meshed mode. According to the flat pasting equipment for wafer photoetching development, a pushing disc in the pushing device pushes and takes a wafer placed in a fixed disc out in a way that a