Probe station fault detection method and system, probe station and use method of probe station

The invention provides a probe station fault detection method and system, a probe station and a use method of the probe station. The fault detection system comprises a storage module used for storing preset parameter values, a data acquisition module used for acquiring real-time progress data values, a data processing module and a display module. The data processing module is used for obtaining the preset parameter values and the real-time progress data values, comparing the preset parameter values and the real-time progress data values, and obtaining a specific fault point of the hardware part of the probe station according to a comparison result; and the display module is used for displaying the preset parameter values, the real-time progress data values and the comparison result. By adopting the probe station fault detection system, when the probe station has a fault, the specific fault point of the fault of the hardware part of the probe station can be quickly and accurately obtained by comparing the pres