Target layout and attitude resolving method for air bearing table

The invention discloses a target layout and attitude resolving method for an air bearing table. The method comprises the following steps: firstly, setting five targets on the table surface of the air bearing table, wherein the five targets are circular, the peripheries of the five targets are provid...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LUO ZHOUHUAI, ZHANG HONG, XUE WEI, ZHONG SHENGJUN
Format: Patent
Sprache:chi ; eng
Schlagworte:
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