Target layout and attitude resolving method for air bearing table

The invention discloses a target layout and attitude resolving method for an air bearing table. The method comprises the following steps: firstly, setting five targets on the table surface of the air bearing table, wherein the five targets are circular, the peripheries of the five targets are provided with reflective concentric ring areas, and the inner diameters of the reflective areas are different, and four targets are coplanar with the table top of the air floating table, and the other target is arranged on the table top of the air floating table through a connecting rod; then analyzing the initial frame and the existing frame, calculating position information of the five targets in the initial frame and the existing frame by utilizing different areas of reflective concentric ring areas of the five targets, and finally calculating rotation matrix and translation matrix output attitude information between the initial frame and the existing frame through an ICP algorithm. According to the method, the robust