Flexible film type piezoelectric acoustic emission sensor and manufacturing method thereof

The invention relates to a flexible film type piezoelectric acoustic emission sensor, and belongs to the technical field of electric power engineering. According to the flexible film type piezoelectric electro-acoustic emission sensor disclosed by the invention, all components except a piezoelectric film wafer are flexible; although the piezoelectric film wafer does not have flexibility, the size of the piezoelectric film wafer is very small, so that the piezoelectric film wafer can adapt to a bent surface. In an actual test, the sensor provided by the invention is enough to adapt to a spherical surface with a curvature radius of 80mm, and overcomes the defects that a traditional acoustic emission sensor is large in thickness and not easy to adapt to a curved surface. In addition, a thin film type copper wire in the sensor can be made to be very long, so that the sensor with the structure can extend into some narrow and cramped spaces to work. 本发明涉及一种柔性薄膜式压电声发射传感器，属于电力工程技术领域。本发明的柔性薄膜式压电声发射传感器，除压电薄膜晶片外，所有组成部分均