Built-in plate-like conjugate ion source and vacuum coating device

The invention discloses a built-in plate-like conjugate ion source. The built-in plate-like conjugate ion source comprises a gas transmission assembly and two electrode assemblies which have the same structure and are arranged in pairs, wherein the gas transmission assembly is connected with the ele...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	PENG YICHANG, CHEN TECHAO, CHEN ZHENYANG, TANG DIAN, YANG BIN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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