Built-in plate-like conjugate ion source and vacuum coating device

The invention discloses a built-in plate-like conjugate ion source. The built-in plate-like conjugate ion source comprises a gas transmission assembly and two electrode assemblies which have the same structure and are arranged in pairs, wherein the gas transmission assembly is connected with the electrode assemblies which are installed in a vacuum chamber, the electrode assemblies comprise gas cavities and electrode columns, one ends of the electrode columns are connected with a power supply assembly, the other ends are connected with the gas cavities, gas spraying plates are arranged at the bottoms of the gas cavities, and insulating plates, shielding covers and magnets are sequentially arranged at the side parts of the gas cavities and the electrode columns from inside to outside. Under the action of the power supply assembly, the two electrode assemblies become conjugate discharge assemblies with opposite potentials, and process gas sprayed out of the gas spraying plates of the two electrode assemblies is