FORCE FEEDBACK ACTUATOR AND MEMS TRANSDUCER

The invention relates to a force feedback actuator and a micro electro mechanical system transducer. The invention discloses a force feedback actuator and an MEMS transducer. The force feedback actuator includes a pair of electrodes and a dielectric member. The pair of electrodes are spaced apart fr...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SBIAA ZOUHAIR, NAWAZ MOHSIN, THOMPSON STEPHEN C, LOEPPERT PETE, PEDERSEN MICHAEL
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	DEAF-AID SETS ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PUBLIC ADDRESS SYSTEMS TRANSPORTING
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