FORCE FEEDBACK ACTUATOR AND MEMS TRANSDUCER

The invention relates to a force feedback actuator and a micro electro mechanical system transducer. The invention discloses a force feedback actuator and an MEMS transducer. The force feedback actuator includes a pair of electrodes and a dielectric member. The pair of electrodes are spaced apart from one another to form a gap. The dielectric member is disposed at least partially within the gap. The dielectric member includes a first portion having a first permittivity and a second portion having a second permittivity that is different from the first permittivity. The dielectric member and the pair of electrodes are configured for movement relative to each other. 本发明涉及力反馈致动器和微机电系统电容换能器。公开了一种力反馈致动器和MEMS电容换能器。该力反馈致动器包括一对电极和介电构件。一对电极彼此间隔开以形成间隙。介电构件至少部分地设置在间隙内。介电构件包括具有第一介电常数的第一部分和具有与第一介电常数不同的第二介电常数的第二部分。介电构件和一对电极被构造成相对于彼此移动。