Capacitive torque sensor with optimized deformation beam structure
The invention discloses a capacitive torque sensor with an optimized deformation beam structure. The capacitive torque sensor comprises a sensor main body, a circuit board and a plurality of groups of capacitors, and is characterized in that the sensor main body comprises a sensor outer ring connect...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses a capacitive torque sensor with an optimized deformation beam structure. The capacitive torque sensor comprises a sensor main body, a circuit board and a plurality of groups of capacitors, and is characterized in that the sensor main body comprises a sensor outer ring connected with a load end and the circuit board, a sensor inner ring connected with a power end and a deformation beam connected between the sensor outer ring and the sensor inner ring, wherein each group of capacitors comprises a moving electrode and a static electrode, the moving electrode is vertically fixed on an inner ring of the sensor along the axial direction of the sensor, a static electrode is vertically arranged on the circuit board and is positioned on one side of the moving electrode, surfaces of the static electrode and the moving electrode are parallel to each other, and a gap is reserved between the static electrode and the moving electrode; the shape of the deformation beam is a waist shape with a narrow |
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