Wafer storage devices, associated methods and apparatus

The invention relates to wafer storage devices, associated methods and an apparatus. The wafer storage device includes one or more sensors coupled to at least some of the one or more rails. The one or more sensors may be configured to detect a physical property of the wafer. The wafer storage device...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	CHANDRASEKARAN NAGASUBRAMANIYAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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