Wafer storage devices, associated methods and apparatus

The invention relates to wafer storage devices, associated methods and an apparatus. The wafer storage device includes one or more sensors coupled to at least some of the one or more rails. The one or more sensors may be configured to detect a physical property of the wafer. The wafer storage device may further include a processor configured to analyze data from the one or more sensors, and a memory device. The memory device may be configured to store data generated by at least the one or more sensors or the processor. The wafer storage device may also include a power storage device configured to receive power from an external source and provide power to the one or more sensors and the processor. 本申请涉及晶片存储器件、相关联方法和装置。所述晶片存储器件包括耦合到所述一或多个导轨中的至少一些导轨的一或多个传感器。所述一或多个传感器可被配置成检测晶片的物理性质。所述晶片存储器件还可以包括被配置成分析来自所述一或多个传感器的数据的处理器，以及存储器器件。所述存储器器件可被配置成存储由至少所述一或多个传感器或所述处理器产生的数据。所述晶片存储器件还可以包括电力存储器件，所述电力存储器件被配置成从外部源接收电力并向所述一或多个传感器和所述处理器提供电力。