LIFT PIN HOLDER ASSEMBLIES AND BODIES INCLUDING LIFT PIN HOLDER ASSEMBLIES

Embodiments of the present disclosure generally relate to lift pin holders, lift pin holder assemblies, and substrate supports containing the lift pin holder and/or the lift pin holder assembly. In one or more embodiments, a lift pin holder contains a cap having a first outside diameter, a base coup...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LEE JONGCHAN, BLAHNIK JEFFREY CHARLES, SCHALLER JASON M
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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