LIFT PIN HOLDER ASSEMBLIES AND BODIES INCLUDING LIFT PIN HOLDER ASSEMBLIES

Embodiments of the present disclosure generally relate to lift pin holders, lift pin holder assemblies, and substrate supports containing the lift pin holder and/or the lift pin holder assembly. In one or more embodiments, a lift pin holder contains a cap having a first outside diameter, a base coupled to the cap where the base has a second outside diameter, a first bore formed axially through the cap and the base where the first bore has a sidewall, and a plurality of second bores extending from the sidewall of the first bore to an outer surface of the base where a spring-loaded member is disposed within each of the second bores. 本公开内容的实施例总体上涉及升降杆固持器、升降杆固持器组件、以及包含升降杆固持器和/或升降杆固持器组件的基板支撑件。在一个或多个实施例中，一种升降杆固持器包含：具有第一外径的顶盖；耦接到顶盖的基部，其中基部具有第二外径；轴向地穿过顶盖和基部形成的第一孔腔，其中第一孔腔具有侧壁；以及从第一孔腔的侧壁延伸到基部的外表面的多个第二孔腔，其中弹簧加载构件被设置在第二孔腔中的每一者内。