Rotary union with mechanical seal assembly

The invention provides a rotary union including an inner shaft, wherein the inner shaft is rotatable and includes an internal channel operable to deliver a cryogenic fluid to a platen. The rotary union may further include a rotary union shaft surrounding the inner shaft; and a seal assembly coupled to the rotary union shaft. The seal assembly may include a support; a metal bellows extending around an exterior of the support; and a seal support coupled to the metal bellows, wherein the seal support extends around the support. The seal assembly may further include a non-rotating seal component seated in the seal support; and a rotating seal component in abutment with the non-rotating seal component to create a mechanical seal therebetween. 本发明提供一种旋转组合，所述旋转组合包括内轴，其中内轴是能够旋转的且包括内部通道，内部通道能够操作以将低温流体递送至台板。旋转组合可更包括：旋转组合轴，环绕内轴；以及密封组件，耦合至旋转组合轴。密封组件可包括：支撑件；金属波纹管，围绕支撑件的外部延伸；以及密封支撑件，耦合至金属波纹管，其中密封支撑件围绕支撑件延伸。密封组件可更包括：非旋转密封部件，安置于密封支撑件中；以及旋转密封部件，邻接非旋转密封部件以在其间形成机械密封件。