ELECTROSTATIC CHUCK

Disclosed is an electrostatic chuck with a cooling structure using a cooling gas. The electrostatic chuck comprises: an electrostatic chuck plate that includes a plurality of first cooling gas holes formed in a first region and a plurality of second cooling gas holes formed in a second region; and a base member that includes a first flow path pattern connected to the plurality of first cooling gas holes, a second flow path pattern connected to the plurality of second cooling gas holes, and an inlet moving pattern changing a position of an inlet of a cooling gas injected into the first flow path pattern. 本发明涉及一种具有利用冷却气体的冷却结构的静电吸盘，包括：静电吸盘板，所述静电吸盘板包括在第一区域形成的多个第一冷却气体孔、在第二区域形成的多个第二冷却气体孔；及基材，所述基材具备与所述多个第一冷却气体孔连接的第一流路图案、与所述多个第二冷却气体孔连接的第二流路图案、变更注入所述第一流路图案的冷却气体的流入口位置的流入口移动图案。