Mask plate and manufacturing method thereof

The invention belongs to the technical field of mask plates, and particularly relates to a mask plate and a manufacturing method thereof. The mask plate comprises a mask plate body, a mask plate frame and a mask plate substrate, the mask plate substrate is stacked on the back of the mask plate body,...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ZHI QIDONG, HUANG BIN, QIAN CHAO, YU YANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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