Mask plate and manufacturing method thereof

The invention belongs to the technical field of mask plates, and particularly relates to a mask plate and a manufacturing method thereof. The mask plate comprises a mask plate body, a mask plate frame and a mask plate substrate, the mask plate substrate is stacked on the back of the mask plate body,...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHI QIDONG, HUANG BIN, QIAN CHAO, YU YANG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention belongs to the technical field of mask plates, and particularly relates to a mask plate and a manufacturing method thereof. The mask plate comprises a mask plate body, a mask plate frame and a mask plate substrate, the mask plate substrate is stacked on the back of the mask plate body, the mask plate substrate and the mask plate body are bonded, a joint strip is embedded in the side edge of the mask plate body, and the mask plate body is bonded with the mask plate frame through the joint strip; the mask frame is divided into a first preparation area and a second preparation area, the length of the first preparation area and the width of the second preparation area are larger than those of the first preparation area and the second preparation area, and calibration patterns are engraved on the first preparation area and the second preparation area. The mask plate and the manufacturing method thereof have the advantages that higher controllability is achieved when the mask plate is subjected to net