Simple inclined illumination type color confocal measurement system and detection method

The invention relates to a simple inclined illumination type color confocal measurement system, which comprises a multi-color point light source module, a dispersion lens module, a moving object carrying module, a reflecting mirror and a light acquisition and calculation module, wherein light emitte...

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Bibliographische Detailangaben
Hauptverfasser: XIAO ZEZHEN, CHENG FANG, YU QING, WANG CHONG, SHANG WENJIAN, WANG YIN, DONG SHENGCHAO, ZHANG YI, ZHANG YALI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to a simple inclined illumination type color confocal measurement system, which comprises a multi-color point light source module, a dispersion lens module, a moving object carrying module, a reflecting mirror and a light acquisition and calculation module, wherein light emitted by the multi-color point light source module obliquely downwards penetrates through the dispersion lens module to the moving object carrying module, then is obliquely upwards reflected to the reflecting mirror, and is secondarily reflected to the light acquisition and calculation module, the moving object carrying module loads a measured object, incident light is projected to the surface of the measured object at an inclination angle, light with different wavelengths is focused to different axial heights to form light spots on the surface of the measured object, the light acquisition and calculation module receives and analyzes light wave signals, the measured object is moved, and the light acquisition and calcul