Silicon nitride-based heating body and preparation process thereof

The invention relates to the technical field of heating body components, in particular to a silicon nitride-based heating body and a preparation process thereof. The preparation method of the heating body comprises the following steps of S1, carrying out cutting, grinding and polishing pretreatment on a silicon nitride substrate, S2, placing the pretreated silicon nitride substrate in a sintering furnace to be sintered in an inert atmosphere, S3, atomizing the reaction liquid through air pressure to form small liquid drops, transferring the small liquid drops to the surface of a preheated silicon nitride substrate through carrier gas, and performing thermal decomposition to form a tin oxide film to coat the surface of the substrate, and S4, carrying out heat treatment on the silicon nitride substrate coated with the tin oxide film to obtain the heating body. According to the silicon nitride-based heating body, the compressive strength reaches up to 1300 MPa, the bearable power density reaches up to 100 W/cm a