DETECTION SYSTEM FOR AN ALIGNMENT SENSOR

A detection system for an alignment sensor, and an alignment sensor and lithographic projection apparatus comprising such a detection system is disclosed. The detection system comprises at least one detection circuit; and a plurality of optical fiber cores for transporting a measurement signal to the at least one detection circuit. At least as subset of the plurality of optical fiber cores are selectively switchable between a detection state and a non-detection state, thereby defining a configurable detection spot. 公开了一种用于对准传感器的检测系统、以及包括这种检测系统的对准传感器和光刻投影装置。检测系统包括：至少一个检测电路；以及多个光纤芯，用于将测量信号传输到至少一个检测电路。多个光纤芯的至少一个子集可选择地在检测状态和非检测状态之间切换，从而限定可配置检测斑点。