TEMPERATURE CONTROL DEVICE

A temperature control device comprising: a top plate supporting a substrate; a base plate connected to the top plate so as to form an internal space therebetween; a thermoelectric module plate arranged in the internal space; a heat exchange plate arranged in the internal space and exchanging heat with the thermoelectric module plate; a first joining member that joins the top plate and the base plate via the thermoelectric module plate and the heat exchange plate and is fixed to both the top plate and the base plate; and a second joining member that joins the top plate and the base plate via the thermoelectric module plate and the heat exchange plate, is fixed to the top plate, and is movable relative to the base plate. 温度调节装置具备：顶板，其支承基板；底板，其以在与顶板之间形成内部空间的方式与顶板连接；热电模块板，其配置于内部空间；热交换板，其配置于内部空间，并与热电模块板进行热交换；第一结合部件，其经由热电模块板以及热交换板将顶板和底板结合，并分别固定在顶板以及底板上；第二结合部件，其经由热电模块板以及热交换板将顶板和底板结合，并固定在顶板上且能够与底板相对移动。