ELECTRON MICROSCOPE STAGE

A positioning system for an electron microscope includes a first bracket and a second bracket, the first bracket including a holder for holding a workpiece. The first bracket is coupled to one or more first drive units configured to position the workpiece along a first axis, a second axis, and a third axis and along a first inclined axis. The second bracket accommodates the one or more first drive units and is coupled to one or more second drive units configured to position the workpiece along a second inclined axis. 一种用于电子显微镜的定位系统，包括：第一托架和第二托架，所述第一托架包括用于固持工件的固持器。所述第一托架联接到一个或多个第一驱动单元，所述一个或多个第一驱动单元被配置成沿第一轴线、第二轴线和第三轴线并且沿第一倾斜轴线定位所述工件。所述第二托架容纳所述一个或多个第一驱动单元，并且联接到一个或多个第二驱动单元，所述一个或多个第二驱动单元被配置成沿第二倾斜轴线定位所述工件。