GAS MIXING FOR FAST TEMPERATURE CONTROL OF A COOLING HOOD

The present invention relates to a system comprising a sub-system that is configured to change a thermal condition of a physical component from a set-point to a new set-point, wherein the sub-system comprises: a mixer operative to receive a first conditioning fluid having a first temperature and a s...

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Hauptverfasser: VALENTIN CHRISTIAAN LOUIS, VAN SANTVOORT JOHANNES FRANCISCUS MARTINUS, HEMSCHOOTE DRIES VAAST PAUL, DE HOOGH JOOST, WIT ROBERT COENRAAD, VAN DER MEULEN FRITS, RADU DONNERS, LEROUX ALAIN LOUIS CLAUDE, HUIJBERTS ALEXANDER MARINUS ARNOLDUS
Format: Patent
Sprache:chi ; eng
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