GAS MIXING FOR FAST TEMPERATURE CONTROL OF A COOLING HOOD

The present invention relates to a system comprising a sub-system that is configured to change a thermal condition of a physical component from a set-point to a new set-point, wherein the sub-system comprises: a mixer operative to receive a first conditioning fluid having a first temperature and a second conditioning fluid having a second temperature different from the first temperature, and operative to supply to the physical component a mix of the first conditioning fluid and the second conditioning fluid; and a controller configured to control the mixer in dependence on the new set-point. Also described is a method of operating a lithographic apparatus as well as a device manufactured using the system described herein or according to the methods described herein. 本发明涉及包括子系统的系统，所述子系统被配置成将实体部件的热状况从一设定点改变为新的设定点，其中所述子系统包括：混合器，混合器能够操作以接收具有第一温度的第一调节流体和具有不同于第一温度的第二温度的第二调节流体，并且混合器能够操作以向所述实体部件供应所述第一调节流体和所述第二调节流体的混合物；和控制器，该控制器被配置成根据所述新的设定点来控制所述混合器。还描述了操作光刻设备的方法以及使用本文所描述的所述系统或根据本文所描述的所述方法制造的装置。