High-frequency power source
The invention provides a high-frequency power source that can output high-frequency electric power as a desired waveform that changes at high-speed. A high-frequency power source 1 is provided with two DC-RF conversion units 4A, 4B, and an RF combining unit 5 for combining the both DC-RF conversion...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention provides a high-frequency power source that can output high-frequency electric power as a desired waveform that changes at high-speed. A high-frequency power source 1 is provided with two DC-RF conversion units 4A, 4B, and an RF combining unit 5 for combining the both DC-RF conversion unit 4A, 4B outputs. The DC-RF conversion units 4A, 4B amplify, respectively, high-frequency voltages va, vb input from a high-frequency signal generating unit 8, and output high-frequency voltages vPA, vPB. The RF combining unit 5 outputs a high frequency voltage vPX proportionally corresponding to the phase difference [theta] of the high-frequency voltages vPA, vPB. A control unit 9 switches the phase difference [theta] between [theta]1 and [theta]2. Thus, the output electric power PX output by the RF combining unit 5 is a pulse high-frequency electric power having a high level period and a low level period. The switching of the phase difference [theta] can be carried out at high speed; therefore, pulse high-freq |
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