TEMPERATURE CONTROL SYSTEM AND INTEGRATED TEMPERATURE CONTROL SYSTEM

A temperature control system 200 includes: a first circulation circuit 110 through which a first heat transfer medium circulates; a second circulation circuit 120 that is independent of the first circulation circuit and through which a second heat transfer medium circulates; and a third circulation...

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Bibliographische Detailangaben
Hauptverfasser: FUKUSUMI YUKIHIRO, ITO AKIHIRO, TAKANASHI KEISUKE, NAKAZAWA TOSHIHARU, KOKETSU MASAYUKI, KUNIYASU NORIO, HASEGAWA ISAHIRO
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:A temperature control system 200 includes: a first circulation circuit 110 through which a first heat transfer medium circulates; a second circulation circuit 120 that is independent of the first circulation circuit and through which a second heat transfer medium circulates; and a third circulation circuit 130 that is independent of the first circulation circuit and the second circulation circuit and through which a third heat transfer medium circulates. The first circulation circuit comprises a first adjusting device (11) for adjusting the temperature of the first heat medium to a first temperature and then discharging the first heat medium, and a first flow-through path (114). The second circulation circuit is provided with a second adjusting device (21) for adjusting the temperature of the second heat medium to a second temperature higher than the first temperature and then discharging the second heat medium, and a second flow-through path (124). The third circulation circuit is provided with: a third flow