Robot system, robot controlling method, and semiconductor manufacturing system

A robot system, a robot controlling method, and a semiconductor manufacturing system are provided which are capable of reducing the pivoting radius while ensuring the elongation of the arm. The robot includes: a first arm (17) that is a horizontal multi-joint type arm provided with a first base link...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YAMAGUCHI TAKESHI, AKAE HIROMITSU
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HAND TOOLS MANIPULATORS PERFORMING OPERATIONS PORTABLE POWER-DRIVEN TOOLS SEMICONDUCTOR DEVICES TRANSPORTING
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