Laser foreign matter removing device and method based on lens micro-vibration and steering control

The invention provides a laser foreign matter removing device and method based on lens micro-vibration and steering control. The device comprises a laser emitting device, an adjustable optical lens and a micro-vibration and steering control system, wherein the laser emitting device emits laser beams, the adjustable optical lens is used for reflecting the laser beams, steering and micro-vibration of the adjustable optical lens are controlled by the micro-vibration and steering control system, the reflected laser beams aim at foreign matter through steering of the adjustable optical lens, and reflected laser forms a laser knife with the cutting width, speed and direction corresponding to the shape of the foreign matter through micro-vibration of the adjustable optical lens. The device and the method accurately cut the foreign matter, and are convenient to operate and light in weight. 本发明提供一种基于镜片微振与转向控制的激光异物清除装置及方法，包括激光发射装置，可调光学镜片和微振动与转向控制系统，所述激光发射装置发射激光束，所述可调光学镜片用于反射激光束且受微振动与转向控制系统控制转向和微振动，通过可调光学镜片转向使得反射的激光束瞄准异