HEATING FURNACE

This heating furnace is provided with: a housing having a pair of sidewalls; a workpiece support material configured to be capable of supporting a flat plate-shaped workpiece between the pair of sidewalls so that the workpiece is in a horizontal position; a planar heater for heating from below or ab...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: IRIE TETSUYA, KUWAYAMA SHINJIRO
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:This heating furnace is provided with: a housing having a pair of sidewalls; a workpiece support material configured to be capable of supporting a flat plate-shaped workpiece between the pair of sidewalls so that the workpiece is in a horizontal position; a planar heater for heating from below or above the workpiece supported by the workpiece support material; an electric power supply device for supplying electric power to the planar heater; and a heater support material for supporting the planar heater so that the planar heater is in a horizontal position. The planar heater has a plurality of heating bodies installed arranged side-by-side in a transport direction and in a left-right direction perpendicular in plan view to the transport direction. The plurality of heating bodies have electric wires and sintered bodies for housing the electric wires, include two or more types of heating bodies having different dimensions or shapes, and include intermediate heating bodies having other heating bodies arranged si