COATING CONTROL USING FORWARD PARAMETER CORRECTION AND ENHANCED REVERSE ENGINEERING

A device (300) may include one or more memories (330) and one or more processors (320), communicatively coupled to the one or more memories (330), to receive design information, wherein the design information identifies desired values for a set of layers of an optical element to be generated during one or more runs, receive or obtain historic information identifying a relationship between a parameter for the one or more runs and an observed value relating to the one or more runs or the optical element, determine layer information for the one or more runs based on the historic information, wherein the layer information identifies run parameters, for the set of layers, to achieve the desired values, and cause the one or more runs to be performed based on the layer information. 一种设备(300)可以包括一个或更多个存储器(330)和一个或更多个处理器(320)，该一个或更多个处理器通信地耦合到一个或更多个存储器(330)，以接收设计信息，其中设计信息标识在一次或更多次运行期间生成的光学元件的一组层的期望值；接收或获得标识关于一次或更多次运行的参数和与一次或更多次运行或光学元件相关的观察值之间的关系的历史信息；基于历史信息来确定关于一次或更多次运行的层信息，其中层信息标识关于一组层的实现期望值的运行参数；以及使得一次或更多次运行基于层信息被执行。