Preparation method of ultraviolet light-emitting diode chip with autologous photonic crystal structure

The invention relates to a preparation method of an ultraviolet light-emitting diode chip with an autologous photonic crystal structure. The preparation method comprises the following steps: (1), growing an epitaxial structure (110) on a primary substrate (100); (2), depositing a metal layer (120) o...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CUI ZHIYONG, ZENG YIPING, WEI ZUNKANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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