Crystal pulling equipment
In order to orient a heating device of a crystal pulling device coaxially to the crucible (3) in such a way that an annular gap (13) between the crucible (3) and the heating device is constant over the circumference of the crucible (3), the invention provides that the heating device is arranged in a...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | In order to orient a heating device of a crystal pulling device coaxially to the crucible (3) in such a way that an annular gap (13) between the crucible (3) and the heating device is constant over the circumference of the crucible (3), the invention provides that the heating device is arranged in a housing having an inner protective cover (12), the protective cover resting on a support ring (16), the support ring (16) in turn lies on a bearing pin which is arranged between the base of the container (1) and the support ring (16) and which is fixed at least in the radial direction relative to the base of the container (1) or of the support ring (16).
为了使拉晶设备的加热装置同轴于坩埚(3)来定向,以便坩埚(3)与加热装置之间的环形间隙(13)在所述坩埚(3)的圆周范围内是恒定的,本发明规定,所述加热装置布置在具有内部的防护罩(12)的壳体中,其中所述防护罩静置于支承环(16)上,所述支承环(16)又处于支承销上,所述支承销则布置在容器(1)的底部与所述支承环(16)之间并且所述支承销至少关于径向方向相对于所述容器(1)的或者支承环(16)的底部得到固定。 |
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