Surface acoustic wave filter with multilayer film structure

The invention relates to a surface acoustic wave device, in particular to a surface acoustic wave filter with a multilayer film structure. The filter comprises a piezoelectric layer and metal finger strips arranged above the piezoelectric layer in a comb shape, a functional layer is arranged below t...

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Bibliographische Detailangaben
Hauptverfasser:	LUO XUANSHENG, JIANG PINGYING, LUO DAN, LIU CHUNXUE, LI NI, XIE DONGFENG, PENG XIAO, HE XILIANG, SI MEIJU, YANG BINBIN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRONIC CIRCUITRY ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS RESONATORS
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Beschreibung
Zusammenfassung:	The invention relates to a surface acoustic wave device, in particular to a surface acoustic wave filter with a multilayer film structure. The filter comprises a piezoelectric layer and metal finger strips arranged above the piezoelectric layer in a comb shape, a functional layer is arranged below the piezoelectric layer, a high-sound-velocity layer is arranged below the functional layer, and a supporting substrate is arranged below the high-sound-velocity layer. The wave filter comprises a piezoelectric layer and metal finger strips arranged above the piezoelectric layer in a comb shape, and is characterized in that a functional layer is arranged below the piezoelectric layer, a high-sound-velocity layer is arranged below the functional layer, and the supporting substrate is arranged below the high-sound-velocity layer; and according to the surface acoustic wave filter, the composite film structure of the piezoelectric layer is utilized to suppress body wave scattering, and the clutter loss of the surface wa