Array substrate, display panel and preparation method of array substrate

The invention provides an array substrate, a display panel and a preparation method of the array substrate. The array substrate comprises a substrate, a first insulating layer and a plurality of oxide transistors, wherein the first insulating layer and the substrate layer are arranged in a laminated...

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Bibliographische Detailangaben
Hauptverfasser: TONG XIAOYANG, LIU QUAN, HU ZUQUAN, TAO ZICHAO
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention provides an array substrate, a display panel and a preparation method of the array substrate. The array substrate comprises a substrate, a first insulating layer and a plurality of oxide transistors, wherein the first insulating layer and the substrate layer are arranged in a laminated manner; a plurality of oxide transistors are positioned on one side, provided with the first insulating layer, of the substrate; the first insulating layer contains hydrogen ions, and the orthographic projection of the oxide transistor on the substrate and the orthographic projection of the first insulating layer on the substrate are staggered. According to the array substrate, hydrogen ions in the first insulating layer can be prevented from invading the oxide transistor in the subsequent technological processes such as high temperature, so stability of the oxide transistor can be improved. 本申请提供了一种阵列基板、显示面板以及阵列基板的制备方法,该阵列基板包括:衬底;第一绝缘层,与所述衬底层层叠设置;多个氧化物晶体管,位于所述衬底设置有所述第一绝缘层一侧;其中,所述第一绝缘层中含有氢离子,所述氧化物晶体管在所述衬底上的正投影与所述第