Patterned substrate, preparation method thereof, light emitting diode and preparation method of light emitting diode

The invention discloses a patterned substrate, a preparation method thereof, a light emitting diode and a preparation method of the light emitting diode. In one embodiment, the patterned substrate comprises a substrate and a plurality of patterned structures which are formed on the surface of the substrate and are periodically and tightly arranged, and the minimum distance between the adjacent patterned structures is smaller than or equal to 0.1 [mu]m; the pattern structure comprises a first part formed on the surface of the substrate and a second part formed above the first part, and the first part comprises a cylindrical part, and a first protruding part and a second protruding part which are uniformly distributed around the cylindrical part; and the first protruding parts and the second protruding parts are arranged at intervals, and the cross section area of the first protruding parts is larger than or equal to that of the second protruding parts. Therefore, the patterned substrate and the light emitting