Semiconductor process equipment
The invention provides semiconductor process equipment. The equipment comprises a process chamber with a process window at the top, a control device, an edge temperature measuring piece, a first temperature measuring piece and a second temperature measuring piece, and the edge temperature measuring...
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The invention provides semiconductor process equipment. The equipment comprises a process chamber with a process window at the top, a control device, an edge temperature measuring piece, a first temperature measuring piece and a second temperature measuring piece, and the edge temperature measuring piece is inserted into the process window from the side wall of the edge of the process window and is arranged close to the bottom surface of the process window; the process window comprises a central area and an edge area surrounding the central area, the first temperature measuring piece and the second temperature measuring piece are both arranged above the process window, the first temperature measuring piece corresponds to the central area in position, and the second temperature measuring piece corresponds to the edge temperature measuring piece in position; and the control device is used for determining the temperature of the bottom surface of the central area of the process window according to the temperature |
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