LIGHT IRRADIATION DEVICE

The present invention provides a light irradiation device equipped with a plurality of excimer lamps, and capable of achieving high startability for each of the excimer lamps while suppressing increase in physical strength required for a light extraction surface. The light irradiation device is provided with a plurality of lamp units each formed by housing an excimer lamp in a housing region surrounded by a wall body. Each of the lamp units is provided with a light extraction surface for extracting light emitted from the excimer lamp to the outside, and a communication light transmission window for guiding the light emitted from the excimer lamp to the housing region provided in another adjacent lamp unit. 本发明提供一种光照射装置，搭载多个准分子灯，能够抑制对光取出面要求的物理强度的上升，并且对于各准分子灯实现较高的启动性。光照射装置具备多个在由壁体包围的收容区域中收容准分子灯而成的灯单元。各个灯单元具备：光取出面，将从准分子灯出射的光向外部取出；以及联络用透光窗，将从准分子灯出射的光向相邻接的其他灯单元所具备的收容区域引导。