LEARNING DEVICE, INFERENCE DEVICE, AND LEARNED MODEL

Provided is a learning device for performing machine learning on the basis of a learning model using data input into an input layer. The learning device is provided with: a calculation unit which sets environment information in a processing vessel for performing a semiconductor manufacturing process, and calculates a predetermined number of feature quantities in which simulation data, obtained as the result of a simulation of the semiconductor manufacturing process performed using a predetermined part provided in the processing vessel as a variable, are related to X-Y coordinates parallel with a wafer surface; and an input unit which inputs the predetermined number of calculated feature quantities into the input layer. 提供一种学习装置，使用被输入至输入层的数据，基于学习模型来进行机器学习，所述学习装置具有：计算部，其计算将模拟数据同与晶圆表面平行的XY坐标进行了关联的规定个数的特征量，所述模拟数据是设定用于进行半导体制造工艺的处理容器内的环境信息并将设置于所述处理容器的规定的配件作为变量来进行半导体制造工艺的模拟所得到的结果；以及输入部，其将计算出的所述规定个数的特征量输入至所述输入层。