DIELECTRIC THIN FILM, DIELECTRIC THIN FILM ELEMENT, PIEZOELECTRIC ACTUATOR, PIEZOELECTRIC SENSOR, HEAD ASSEMBLY, HEAD STACK ASSEMBLY, HARD DISK DRIVE, PRINTER HEAD AND INKJET PRINTER DEVICE

This dielectric thin film contains a metal oxide; the metal oxide contains bismuth, sodium, barium and titanium; at least a part of the metal oxide is composed of tetragonal crystals having a perovskite structure; and the (100) planes of at least some of the tetragonal crystals are oriented in the n...

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Hauptverfasser: SATO YUSUKE, SHIMIZU TAKAO, ISHIDA MIRAI, HASEGAWA MIYU, ISHIHAMA KEISUKE, SATO WAKIKO, FUNAKUBO HIROSHI
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:This dielectric thin film contains a metal oxide; the metal oxide contains bismuth, sodium, barium and titanium; at least a part of the metal oxide is composed of tetragonal crystals having a perovskite structure; and the (100) planes of at least some of the tetragonal crystals are oriented in the normal direction dn of the surface of the dielectric thin film 3. 介电薄膜包含金属氧化物,金属氧化物包含铋、钠、钡和钛,金属氧化物的至少一部分为具有钙钛矿结构的正方晶,至少一部分的正方晶的(100)面在介电薄膜3的表面的法线方向dn上取向。