USING IDENTIFIERS TO MAP EDGE RING PART NUMBERS ONTO SLOT NUMBERS
Methods and systems for tracking an edge ring includes capturing an edge ring identifier from a source related to the edge ring. The edge ring is inserted into a slot of an edge ring carrier, wherein the edge ring is assigned to the edge ring carrier. The edge ring identifier is tracked to determine...
Gespeichert in:
Hauptverfasser: | , , , , , |
---|---|
Format: | Patent |
Sprache: | chi ; eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | Methods and systems for tracking an edge ring includes capturing an edge ring identifier from a source related to the edge ring. The edge ring is inserted into a slot of an edge ring carrier, wherein the edge ring is assigned to the edge ring carrier. The edge ring identifier is tracked to determine transfers into and out of the edge ring carrier and into and out of a processing station. The tracking of the edge ring identifier builds a metadata file that provides lifetime information regarding the edge ring.
追踪边缘环的方法和系统包含从与边缘环相关的源捕获边缘环识别符。将该边缘环插入至边缘环载具的槽中,其中该边缘环被分配给该边缘环载具。追踪该边缘环识别符,以确定进出该边缘环载具以及进出处理站的传送。对该边缘环识别符的追踪建立提供关于该边缘环的寿命信息的元数据文件。 |
---|