Mason model of thin-film cavity acoustic resonator

The invention is applicable to the technical field of resonators, and provides a Mason model of a thin-film cavity acoustic resonator, which is characterized in that a series resistor Rs and a parallel resistor Rp are added in an original Mason model of the established thin-film cavity acoustic resonator, so that the quality factor Qp at the parallel resonant frequency in the Mason model of the thin-film cavity acoustic resonator can be independently adjusted by changing the parallel resistor Rp; by changing the series resistor Rs, the quality factor Qs at the series resonant frequency in the Mason model of the thin-film cavity acoustic resonator is independently adjusted, so that the problems that in the prior art, the sizes of Qs and Qp cannot be independently adjusted, fitting of the resonator model and an actual test result is caused, and subsequent design of a filter of the thin-film cavity acoustic resonator is difficult are solved. 本发明适用于谐振器技术领域，提供了一种薄膜腔声谐振器的Mason模型，包括：在建立的薄膜腔声谐振器的原Mason模型中增加串联电阻Rs和并联电