VAPOR DELIVERY HEAD FOR PREVENTING STICTION OF HIGH ASPECT RATIO STRUCTURES AND/OR REPAIRING HIGH ASPECT RATIO STRUCTURES

A vapor delivery head for wet treatment of a substrate includes a body including an upper surface, a lower surface, an upper plenum and a lower plenum. A first bore is arranged on the upper surface ofthe body and fluidly connected to the upper plenum to supply heated fluid. A second bore is arranged on the upper surface of the body and connected to the upper plenum to remove heated fluid. A thirdbore is arranged on the upper surface of the body and connected to the lower plenum to receive a gas mixture. A plurality of through holes through the lower surface of the body are in fluid communication with the lower plenum. 一种用于衬底的湿式处理的蒸气输送头包括主体，该主体包括上表面、下表面、上充气室和下充气室。第一孔布置在所述主体的所述上表面上，并且与所述上充气室流体连接，以供应经加热的流体。第二孔布置在所述主体的所述上表面上，并且连接至所述上充气室，以移除经加热的流体。第三孔布置在所述主体的所述上表面上，且连接至所述下充气室，以接收气体混合物。穿过所述主体的所述下表面的多个通孔与所述下充气室流体连通。