Semiconductor structure

A semiconductor structure is provided. The semiconductor structure comprises a first conductive feature embedded within a first dielectric layer, a via disposed over the first conductive feature, a second conductive feature disposed over the via, and a graphene layer disposed over at least a portion of the first conductive feature. The via electrically couples the first conductive feature to the second conductive feature. 提供半导体结构。半导体结构包括第一导电结构，埋置于第一介电层中；通孔结构，位于第一导电结构上；第二导电结构，位于通孔结构上；以及石墨烯层，位于第一导电结构的至少一部分上。通孔结构电性耦接第一导电结构至第二导电结构。