MEMS sensor with adjustable sensitivity and bandwidth

The invention belongs to the technical field of micro electro mechanical systems, and discloses a sensitivity and bandwidth adjustable MEMS sensor, which comprises a sensitive module and a detection module, wherein the sensitive module comprises a negative stiffness structure and a stable structure; the negative stiffness structure is used for reducing the effective stiffness of the MEMS sensor and improving the sensitivity of device detection, and the stabilizing structure is used for stabilizing the negative stiffness structure and realizing regulation and control of the total effective stiffness of the MEMS sensor. The stabilizing structure comprises a first stabilizing electrode and a second stabilizing electrode, and high-frequency vibration is introduced by applying alternating voltage to the first stabilizing electrode and the second stabilizing electrode to stabilize the negative stiffness structure. The total effective rigidity of the MEMS sensor is changed by changing the amplitude and frequency of