Quartz clamp for wafer and using method thereof

The invention discloses a quartz clamp for a wafer and a using method thereof. The clamp structurally comprises a top plate, a bottom plate and a stand column set, the top plate and the bottom plate are fixedly connected through the stand column set, the stand column set comprises a first stand colu...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHEN HOUZE, XU HUIGANG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a quartz clamp for a wafer and a using method thereof. The clamp structurally comprises a top plate, a bottom plate and a stand column set, the top plate and the bottom plate are fixedly connected through the stand column set, the stand column set comprises a first stand column, a second stand column, a third stand column and a fourth stand column, and the first stand column, the third stand column and the fourth stand column are each fixedly connected with twelve supporting columns distributed at intervals. The supporting columns are used for supporting a wafer, the position for supporting the wafer is supported by a three-point antenna type spherical surface, the surface of a supporting ball head is smooth, sharp protrusions are not prone to being formed, in the using process, the wafer is directly conducted between the wafer rewinder and the quartz clamp, and the wafer is supported and positioned in the wafer sintering process. And the scraping and collisionwith a glass sintering fu