Charged particle beam device

The invention provides a charged particle beam device capable of automatically stabilizing MS. The charged particle beam device, which automatically creates a sample sheet from a sample, is provided with: a charged particle beam irradiation optical system that irradiates a charged particle beam; a sample stage on which the sample is placed and moved; a sample sheet transfer unit for holding and transferring the sample sheet separated from the sample and picked up; a holder fixing table that holds a sample holder on which a sample is to be moved; and a computer that controls the position on thebasis of a result of a second determination for the position on the basis of a result of the first determination for the position related to the object, and information including an image acquired bythe irradiation of the charged particle beam. 本发明提供带电粒子束装置，能够使自动MS稳定化。带电粒子束装置是从试样中自动地制作试样片的带电粒子束装置，具备：带电粒子束照射光学系统，其照射带电粒子束；试样载台，其载置试样而移动；试样片移设单元，其保持从试样中分离并摘出的试样片而进行输送；支架固定台，其保持用于移设试样片的试样片支架；以及计算机，其基于根据针对与对象物相关的位置的第1判定的结果而进行的针