Regulation method and regulation device for electron energy

The invention discloses a regulation method and a regulation device for electron energy, relates to the technical field of electron energy regulation, and mainly solves the technical problems of extremely high cost and inconvenient operation in case of changing electron incident energy. According to...

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Bibliographische Detailangaben
Hauptverfasser: ZHUANG QINGDE, HUANG QICHANG, LIU TIANLUN, LI QIHENG, LIU ZHAOSHENG, GE WEI, BAO GUI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a regulation method and a regulation device for electron energy, relates to the technical field of electron energy regulation, and mainly solves the technical problems of extremely high cost and inconvenient operation in case of changing electron incident energy. According to the invention, the technical problems are solved by energy attenuation on electrons through attenuation medium with a certain length before the electrons enter a target object. The regulation method for electron energy comprises the following steps: determining electron energy requiring be emittedinto the target object in advance; determining the size of the attenuation medium according to an electron energy attenuation formula of the attenuation medium; and setting the attenuation medium withthe size on an electron transmission path, so that electrons pass through the attenuation medium and then are emitted into the target object. According to the invention, the energy of the electrons entering the target object