Radio frequency ion source impedance matching method and device

The invention discloses a radio frequency ion source impedance matching method and device, and the method comprises the steps: enabling a resonance circuit to be connected in series between an inverter circuit and a radio frequency ion source, enabling the radio frequency ion source to obtain sine voltage and current with the same phase in a resonance mode, and causing the resonant frequency of aload loop to change when the equivalent impedance of the radio frequency ion source changes; obtaining resonance frequencies of the resonance circuit and the radio frequency ion source through adoption of a harmonic identification and sweep frequency detection method, and changing the output frequency of the inverter circuit by changing the frequency of a switching tube driving signal of the inverter circuit, so that the output frequency of the inverter circuit is consistent with the resonance frequency of a load loop, resonance is carried out again, the impedance matching problem is solved, and the maximum power tran