Preparation method of IGZO array substrate

The invention discloses a preparation method of an IGZO array substrate. The method comprises the following steps: sequentially adding a glass substrate into acetone, deionized water and ethanol, ultrasonically cleaning, and blow-drying by an air knife; depositing a metal film on the surface of the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LI CHEN, ZHU WENKUN, YUE HAOYANG, ZHENG ZAIWEN, FENG JINBO, YANG FAN, LIN DAN, QIU HUI, HE RONG, REN YAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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